Semitron™ MPR 1000 PAI shapes possess excellent heat resistance and low rates of outgassing and erosion in plasma chambers. This high purity material with low ionic content is often chosen for vacuum chamber applications within etch, CVD and ion implant sub-segmentations in the semiconductor and electronics industry.
Semitron™ MPR 1000 PAI shows increased lifetime over traditional materials, for example up to 25x over polyimide in ozone in some cases. Due to its longevity, it is specified against traditional materials used in vacuum chamber applications such as quartz, ceramics, polyimides and other engineering plastics.
PROPERTIES
Low ionic content and low outgassing
Excellent heat resistance
Minimized rate of erosion in plasma chambers
Optimal chip resistance, durability and machinability
Designed specifically for demanding chamber applications
Thermal Properties
Property
Value
Heat Deflection Temperature at 1.8MPa (264 psi) (ºC)
278
Continuous allowable service temperature in air
260
Mechanical Properties
Property
Value
Tensile Strength (MPa)
99
Tensile Modulus of Elasticity (MPa)
6,050
Compressive stress at 1% nominal strain (MPa)
47
Compressive stress at 2% nominal strain (MPa)
79
Compressive stress at 5% nominal strain (MPa)
130
Flexural Strength (MPa)
Charpy Impact Notched (kJ/m²)
5.0
Chemical Properties
Property
Value
Hot Water / Steam
Limited
Acids, Weak
Acceptable
Acids, Strong (pH 1-3)
Limited
Alkalies, Weak
Limited
Alkalies, Strong (pH 11-14)
Not acceptable
Hydrocarbons - Aromatic
Acceptable
Hydrocarbons - Aliphatic
Acceptable
Ketones, Esters
Acceptable
Chlorinated Solvents
Acceptable
Alcohols
Acceptable
Inorganic Salt Solutions
Acceptable
Electrical Properties
Property
Value
Dielectric Strength (kV/mm)
Certification Properties
Property
Value
FDA
Not compliant
European Food Approval
Not compliant
NSF
Not compliant
3A-SSI
Not compliant
Canada AG
USDA
Not compliant
Flammability (UL Rating)
V-0
Medical use
Miscellaneous Properties
Property
Value
Base Material
PAI
Brand Family
Colors
Yellow-brown
Density (g/cm3)
1.47
Water Absorption after 24 hrs immersion in water (%)
