Semitron™ MPR 1000 PAI shapes possess excellent heat resistance and low rates of outgassing and erosion in plasma chambers. This high purity material with low ionic content is often chosen for vacuum chamber applications within etch, CVD and ion implant sub-segmentations in the semiconductor and electronics industry.
Semitron™ MPR 1000 PAI shows increased lifetime over traditional materials, for example up to 25x over polyimide in ozone in some cases. Due to its longevity, it is specified against traditional materials used in vacuum chamber applications such as quartz, ceramics, polyimides and other engineering plastics.
מאפיינים
Low ionic content and low outgassing
Excellent heat resistance
Minimized rate of erosion in plasma chambers
Optimal chip resistance, durability and machinability
Designed specifically for demanding chamber applications
